|
- High Precision 4 Aixs Stage Control.
- Mega Pixel CCD for Measureing and Zoom CCD for Reviewing
- Using DataBase for Saving and Monitoring Result.
사양
| Measured Product
| Screen Mask, Poto Mask, Sample Glass
|
| Measurement Range
|
Linewidth (0.5~1000㎛)
Thickness (0.1~500㎛)
Laser Displacement (0.5~500㎛)
Coating Thickness (300Å~50㎛)
|
| Accuracy
| ±0.1㎛
|
| Measuring Speed
| Max. 300㎜/s
|
| Repeatability
| ±0.5㎛
|
| Components
|
- Laser Sensor
- Stage : Linear Motor System(Gentry Stage), Measurement Table, Motion Controller (Optinal - U-MAC, MP2300, MEI)
- Masureing Plate (Air Floating, Vaccum System)
- Roller Conveyor System
- Anti Vibration
- 1.5Mega Pixel Array CCD can Auto Focus
- Color Array CCD, Zoom In/Out video
|
| Features
|
Size : 3000(X) X 3300(Y) X 150(Z) ㎜
Weight : 7 Ton
Manual/Auto Mode
Auto Focus
Auto Lignt Emitting Control
Easy Teaching Recipe
Quality Control based on Database
Production Feedback Report
Real Time Image Processing
Easy Stage Control using by Joystick |
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