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- High Precision 4 Aixs Stage Control.
- Mega Pixel CCD for Measureing and Zoom CCD for Reviewing
- Using DataBase for Saving and Monitoring Result.
사양
| Measured Product
| LCD Panel Gen5, Gen6, Gen7, Gen7L
|
| Measurement Range
| 0.1mm - 1.0mm
|
| Accuracy
| ±10㎛
|
| Repeatability
| ±10㎛(measured by the laser interferometer)
|
| Components
|
- Stage : Linear Motor System(Gentry Stage), Measurement Table, Motion Controller (Optinal - U-MAC, MP2300, MEI)
- Masureing Plage (Air Floating, Vaccum System)
- Roller Conveyor System)
- Copper Bulges Min. 0.5mm or 0.7mm2, Max. 5mm
|
| Measuring Speed
| Max. 300 ㎜/s
|
| Features
|
Controlled Light Emitting Type
Image by Multi Sensitivity Control
Real Time Image Processing
Quantity & Grade Control By a Number of
Standards
Stable stage |
|
Click to enlarge image 
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